JPS60262043A - 表面の清浄度計測方法 - Google Patents

表面の清浄度計測方法

Info

Publication number
JPS60262043A
JPS60262043A JP11882084A JP11882084A JPS60262043A JP S60262043 A JPS60262043 A JP S60262043A JP 11882084 A JP11882084 A JP 11882084A JP 11882084 A JP11882084 A JP 11882084A JP S60262043 A JPS60262043 A JP S60262043A
Authority
JP
Japan
Prior art keywords
electrons
sample
specimen
covered
contamination layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11882084A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556460B2 (en]
Inventor
Masayuki Uda
応之 宇田
Fumiaki Kirihata
桐畑　文明
Sukenori Shirohashi
白橋　典範
Hiroshi Ishida
博志 石田
Shinji Marutani
新治 丸谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RIKEN
Original Assignee
RIKEN
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RIKEN filed Critical RIKEN
Priority to JP11882084A priority Critical patent/JPS60262043A/ja
Publication of JPS60262043A publication Critical patent/JPS60262043A/ja
Publication of JPH0556460B2 publication Critical patent/JPH0556460B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/227—Measuring photoelectric effect, e.g. photoelectron emission microscopy [PEEM]
    • G01N23/2273—Measuring photoelectron spectrum, e.g. electron spectroscopy for chemical analysis [ESCA] or X-ray photoelectron spectroscopy [XPS]

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP11882084A 1984-06-09 1984-06-09 表面の清浄度計測方法 Granted JPS60262043A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11882084A JPS60262043A (ja) 1984-06-09 1984-06-09 表面の清浄度計測方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11882084A JPS60262043A (ja) 1984-06-09 1984-06-09 表面の清浄度計測方法

Publications (2)

Publication Number Publication Date
JPS60262043A true JPS60262043A (ja) 1985-12-25
JPH0556460B2 JPH0556460B2 (en]) 1993-08-19

Family

ID=14745947

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11882084A Granted JPS60262043A (ja) 1984-06-09 1984-06-09 表面の清浄度計測方法

Country Status (1)

Country Link
JP (1) JPS60262043A (en])

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193441A (ja) * 1982-05-07 1983-11-11 Hitachi Ltd 光電子測定装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58193441A (ja) * 1982-05-07 1983-11-11 Hitachi Ltd 光電子測定装置

Also Published As

Publication number Publication date
JPH0556460B2 (en]) 1993-08-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term